MEMS transducer having at least one metal layer and one oxide layer

Abstract: in one aspect, a mems transducer, in particular a mems sound transducer unit, preferably for generating and/or detecting sound waves in the audible wavelength spectrum and/or in the ultrasonic range, includes a carrier and at least one piezoelectric element. the piezoelectric element(s) is arranged on the carrier and is deflectable in the direction of a stroke axis, with the piezoelectric element(s) having at least one piezoelectric layer and at least one carrier layer, wherein, by means of the at least one piezoelectric layer, electrical signals and deflections of the piezoelectric element can be converted from one into the other. the carrier layer includes at least one metal layer and at least one oxide layer.

Inventor(s): Andrea Rusconi Clerici Beltrami, Ferruccio Bottoni, Christian Novotny, Samu Bence Horváth

CPC Classification: H04R17/02 (Microphones)

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