TEST SYSTEM FOR A CAMERA, MASK INSPECTIONS SYSTEM AND METHOD FOR TESTING A CAMERA

Abstract: a test system for a camera, comprising a camera and a first capture plate. the camera comprises a camera housing and a vacuum flange formed on the camera housing. the vacuum flange is adapted for attaching the camera to a vacuum chamber. the camera housing supports an image sensor. the image sensor comprises an image sensor surface layer. the first capture plate comprises a first capture plate surface layer. the first capture plate surface layer corresponds to the image sensor surface layer. the invention also relates to a mask inspection system and to a method for testing a camera, in particular, an euv camera.

Inventor(s): Senthil Lakshmanan, Lutz Brekerbohm, Michaela Schubert, Ulrich Matejka

CPC Classification: H04N17/002 (Diagnosis, testing or measuring for television systems or their details)

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