MICROELECTRONIC DEVICES INCLUDING ACTIVE CONTACTS AND SUPPORT CONTACTS

Abstract: a microelectronic device, including a stack structure including alternating conductive structures and dielectric structures is disclosed. memory pillars extend through the stack structure. contacts are laterally adjacent to the memory pillars and extending through the stack structure. the contacts including active contacts and support contacts. the active contacts including a liner and a conductive material. the support contacts including the liner and a dielectric material. the conductive material of the active contacts is in electrical communication with the memory pillars. methods and electronic systems are also disclosed.

Inventor(s): S M Istiaque Hossain, Indra V. Chary, Anilkumar Chandolu, Sidhartha Gupta, Shuangqiang Luo

CPC Classification: H01L23/5283 ({Geometry or} layout of the interconnection structure {( takes precedence; algorithms )})

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