SUBSTRATE TRANSPORT APPARATUS AND SUBSTRATE PROCESSING DEVICE INCLUDING THE SAME

Abstract: when a substrate is held by a first hand, a servomotor is operated to move each guide to an outer peripheral surface of the substrate. when a tactile sensor detects that each guide abuts on the outer peripheral surface of the substrate, the servomotor adjusts a biasing force by each guide to the outer peripheral surface of the substrate according to the shape of the substrate. therefore, the grasping force can be adjusted according to the shape of the substrate such as warpage and a thickness of the substrate. as a result, it is possible to prevent the substrate from being damaged during transportation regardless of the shape of the substrate.

Inventor(s): Hiroyuki KAWAHARA, Takashi OTA, Michinori IWAO, Takuya SATO

CPC Classification: H01L21/68707 (using mechanical means, e.g. chucks, clamps or pinches {(using elecrostatic chucks )})

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