SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

Abstract: a substrate transfer apparatus includes a hand, a horizontal drive mechanism that advances and retracts the hand, at least two guides that clamp an outer peripheral surface of the substrate to separate and hold the substrate from the hand, an advancing/retracting drive mechanism that drives at least one of the at least two guides, an acquisition unit that acquires clamp position information indicating a position in the horizontal plane where the guide clamps the outer peripheral surface of the substrate, and a control unit that determines a consumption degree of the guide on a basis of the acquired clamp position information.

Inventor(s): Hiroyuki KAWAHARA, Yuichi TAKAYAMA, Takuya SATO

CPC Classification: H01L21/67742 ({Mechanical parts of transfer devices (robots in general in )})

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