STAINLESS STEEL MEMBER FOR APPARATUS FOR MANUFACTURING SEMICONDUCTOR AND METHOD FOR MANUFACTURING THE SAME

Abstract: provided is a chromium oxide film-coated stainless steel member containing metal impurities at a small amount and having high heat-retaining properties. a chromium oxide film-coated stainless steel member wherein the thickness of a chromium oxide film is 190 to 280 nm, and the maximum value of the surface reflectance in the near-infrared region (at a wavelength of 750 to 2500 nm) is 60% or less. the chromium oxide film-coated stainless steel member is manufactured by a precise electropolishing step and a step of coating the stainless steel member with a chromium oxide film. the precise electropolishing step comprises pulse voltage impression, microaeration, and electrolyte jetting. the height difference of the polished surface of the stainless steel measured with a scanning probe microscope is 30 nm or less.

Inventor(s): Kazuyoshi KAWAMI, Atsushi KINOSHITA, Naoto OSAKI, Naofumi TERADA, Toshiyuki TANAKA

CPC Classification: H01L21/67023 (Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components {; Apparatus not specifically provided for elsewhere (processes per se , , ; simple temporary support means, e.g. using adhesives, electric or magnetic means , ; apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto ;)})

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