RESIDUAL GAS ANALYSER, PROJECTION EXPOSURE APPARATUS COMPRISING A RESIDUAL GAS ANALYSER AND METHOD OF RESIDUAL GAS ANALYSIS

Abstract: the disclosed techniques relate to a residual gas analyzer, in particular for analyzing a residual gas in an eub projection exposure apparatus, including a mass spectrometer and an admission device for admitting ionized constituents of the residual gas from a vacuum environment into the mass spectrometer. the admission device includes an ion decelerator, with the ion decelerator having an adjustable deceleration voltage in order to subject the ionized constituents to selection with respect to kinetic energy before being transferred into the mass spectrometer. the disclosed techniques also relate to a projection exposure apparatus including such a residual gas analyzer, and a method for residual gas analysis.

Inventor(s): Achim SCHOELL, Thorsten BENTER, Hendrik KERSTEN, Kai KROLL, Marco THINIUS

CPC Classification: H01J49/446 (ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps ; arc lamps with consumable electrodes ; particle accelerators ))

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