Field Emission Electron Source, Electron Optical Device, and Manufacturing Method

Abstract: in a field emission electron source used in an electron optical device, a tip distal end portion of the field emission electron source includes a needle-shaped shunt having a diameter that is reduced toward a distal end, a substantially spherical protrusion formed at the distal end of the shunt, a coating that covers the shunt and the substantially spherical protrusion, and an opening through which a part of the substantially spherical protrusion is exposed, the shunt and the substantially spherical protrusion are formed by using first metal as a material, the coating is formed by using second metal as a material, and the second metal has a work function larger than a work function of the first metal.

Inventor(s): Takeshi KAWASAKI, Tetsuya AKASHI

CPC Classification: H01J1/3044 (ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps ; arc lamps with consumable electrodes ; particle accelerators ))

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