Method for evaluating at least one marker on a physical object for metrological detection of the object

Abstract: the invention relates to a method for evaluating at least one marker () on a physical object () for metrological detection of the object (), comprising the following steps:

Inventor(s): Cedric Donie, Thomas Ludescher, Sergei Mishakin, Paul Frydlewicz

CPC Classification: G03F7/70683 (PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices ; photosensitive materials or processes for photographic purposes ; electrophotography, sensitive layers or processes therefor ))

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