REVERSIBLE OVERCOAT COMPOSITIONS

Abstract: reversible overcoat compositions for overcoating structures during semiconductor microfabrication are described. an example composition includes a first solute with an organic hydroxy functional group, a second solute with an enol ether functional group, and an organic solvent system, with a mole ratio between all of the organic hydroxy functional groups of the first solute and all of the enol ether functional groups of the second solute being between 2.0 and 4.0.

Inventor(s): Charlotte Cutler, Michael Murphy, David Conklin

CPC Classification: G03F7/11 (having cover layers or intermediate layers, e.g. subbing layers {( - , take precedence)})

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