AUTOMATIC MAVERICK WAFER SCREENING USING DIE PASS PATTERN

Abstract: automatic maverick screening of a subject wafer. an inspection pass status is acquired for each of multiple die on a subject wafer. for each of multiple zones of the subject wafer, a pass/fail percentage of the dies within the corresponding zone is compared with an expected pass/fail percentage for the corresponding zone. this expected pass/fail percentage is dependent on a history of pass/fail percentages for previous dies at a same corresponding zone for previously screened wafers. this comparison results in a deviation between the measured pass/fail percentage of the corresponding zone and the expected pass/fail percentage of the corresponding zone. then, the subject wafer is automatically identified as a maverick wafer if the deviation of a predetermined number or more of the multiple zones falls outside of a corresponding deviation tolerance.

Inventor(s): Iman ABDALI MASHHADI, Regina Inyangat AKUDO, Syed Faizan-ul-Haq GILANI

CPC Classification: G01N21/9501 ({Semiconductor wafers (manufacturing processes per se of semiconductor devices implementing a measuring step )})

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