PRESSURE SENSORS AND RELATED METHODS

Abstract: an example pressure sensor comprises a die. the die comprises at least one lateral section and a diaphragm extending between opposing portions of the lateral section. the lateral section and the diaphragm define a top surface and the lateral section define a bottom surface opposite the top surface. the lateral section and the diaphragm partially define a first cavity. the pressure sensor further comprises a top glass layer positioned adjacent to a portion of the top surface. the top glass layer partially defines a second cavity adjacent to the diaphragm. the pressure sensor also comprises a polysilicon layer between the top glass layer and a corresponding portion of the top surface. the polysilicon layer couples the top glass layer to the die.

Inventor(s): Shiva K. Pallinti, Binh N. Tran, Rickey E. Russell

CPC Classification: G01L9/0052 (Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements {( takes precedence)}; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means (measuring differences of two or more pressure values ; measuring two or more pressure values simultaneously ))

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