Vibrator Device And Method For Manufacturing Vibrator Device

Abstract: provided is a vibrator device including a support substrate and a vibrator element. the support substrate includes a frame section. the vibrator element is disposed on the support substrate and includes a base portion. the support substrate includes a first beam and a second beam. the first beam and the second beam are made of the same material as the frame section. the first beam extends from the frame section and includes a first tip in a portion where the first beam overlaps the base portion. the second beam extends from the frame section and includes a second tip in a portion where the second beam overlaps the base portion. the base portion and the first tip are connected to each other with a first bonding member disposed therebetween. the base portion and the second tip are connected to each other with a second bonding member disposed therebetween.

Inventor(s): Seiichiro OGURA

CPC Classification: G01C19/5783 (MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level ; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves ))

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