HIGH TEMPERATURE AUTO TEACH CALIBRATION DISC

Abstract: a calibration disc is inserted into a processing chamber using a robot arm. a first position of a center of the calibration disc is determined using one or more sensors positioned at a port of the processing chamber. the calibration disc is placed onto a substrate support within the processing chamber and features of the calibration disc cause the calibration disc to become centered on the substrate support. the calibration disc is removed from the substrate support and the processing chamber by the robot arm. a second position of the center of the calibration disc is determined using one or more sensors as the calibration is removed from the processing chamber. a difference is determined between the first and second position of the center of the calibration disc. an offset is determined to apply to the robot arm when placing wafers onto the substrate support based on the difference.

Inventor(s): Dylan Arius Harootunian, Damon K. Cox

CPC Classification: G01B21/042 (MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS)

Search for rejections for patent application number 20250172391