FLUID CONTROL DEVICE

Abstract: a fluid control device includes a first main plate, a second main plate, a driving body, a frame body, a plurality of support bodies, a plurality of gaps, a side wall member, a valve film, and a fixing member. a pump chamber is formed by a flat plate part consisting of the first main plate, the frame body, and the plurality of support bodies, and the second main plate and the side wall member. the valve film is disposed on a main surface of the first main plate on the side where the pump chamber is located. the valve film has an annular shape and fixed to the first main plate by the fixing member so that an outer end thereof is a movable end. the outer end of the valve film overlaps the plurality of gaps located between the plurality of support portions in plan view.

Inventor(s): Yutoku KAWABATA, Nobuhira TANAKA

CPC Classification: F16K31/005 ({Actuating devices;} Operating means; Releasing devices {(regulating means )})

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