PROCESS GAS RECYCLING

Abstract: described herein are systems and methods that may be useful in the context of gas reuse thin film deposition equipment. embodiments of the present disclosure are particularly related to one or more of separate collection and recycling one or more gasses such as precursors, reactants, and purge gasses.

Inventor(s): Ivo Johannes Raaijmakers, Eric James Shero, Giuseppe Alessio Verni, Matthew Surman, Michael Eugene Givens, Charles Dezelah

CPC Classification: C23C16/45561 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion ; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. , ; metallising of glass ; metallising mortars, concrete, artificial stone, ceramics or natural stone ; enamelling of, or applying a vitreous layer to, metals ; treating metal surfaces or coating of metals by electrolysis or electrophoresis ; single-crystal film growth ; by metallising textiles ; decorating textiles by locally metallising ))

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