HEATER ASSEMBLY INCLUDING COOLING APPARATUS AND METHOD OF USING SAME

Abstract: a cooling apparatus and methods for maintaining a precursor source vessel heater at a desired temperature are disclosed. the apparatus and methods can be used to maintain a desired temperature gradient within the precursor source vessel for improved integrity of the precursor source before delivery of the precursor to a reaction chamber. the apparatus and methods can also be used for rapid cooling of a source vessel for maintenance.

Inventor(s): Carl Louis White, Eric James Shero, Kyle Fondurulia, Timothy James Sullivan

CPC Classification: C23C16/45544 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion ; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. , ; metallising of glass ; metallising mortars, concrete, artificial stone, ceramics or natural stone ; enamelling of, or applying a vitreous layer to, metals ; treating metal surfaces or coating of metals by electrolysis or electrophoresis ; single-crystal film growth ; by metallising textiles ; decorating textiles by locally metallising ))

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