FILM FORMING APPARATUS

Abstract: a film forming apparatus for forming a film forming material on an object, includes: a chamber; a plasma gun that generates a plasma in the chamber; an anode on which the film forming material is allowed to be disposed in the chamber and that guides the plasma; and a magnetic field generating unit that generates a magnetic field in the chamber. the magnetic field generating unit causes the plasma to be incident on a surface of the film forming material by maintaining the magnetic field such that a zero magnetic field position at which the magnetic field becomes zero is at a predetermined position. the magnetic field generating unit has a directional component in a first direction in which the object and the film forming material face each other, and sets the zero magnetic field position such that the plasma is incident on the surface of the film forming material.

Inventor(s): Yugo OKADA, Makoto MAEHARA, Kimio KINOSHITA

CPC Classification: C23C14/35 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion ; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. , ; metallising of glass ; metallising mortars, concrete, artificial stone, ceramics or natural stone ; enamelling of, or applying a vitreous layer to, metals ; treating metal surfaces or coating of metals by electrolysis or electrophoresis ; single-crystal film growth ; by metallising textiles ; decorating textiles by locally metallising ))

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