MEMS transducer having a carrier layer and at least two piezoelectric layers

Abstract: in one aspect, a mems transducer, in particular a mems sound transducer unit, preferably for generating and/or detecting sound waves in the audible wavelength spectrum and/or in the ultrasonic range, includes a carrier and at least one piezoelectric element. the at piezoelectric element(s) is arranged on the carrier and is deflectable in the direction of a stroke axis, with the piezoelectric element(s) having at least two piezoelectric layers and at least one carrier layer. by means of the at least two piezoelectric layers, electrical signals and deflections of the piezoelectric element(s) can be converted from one into the other. additionally, the carrier layer is arranged between two piezoelectric layers in the direction of the stroke axis.

Inventor(s): Andrea Rusconi Clerici Beltrami, Ferruccio Bottoni, Christian Novotny, Samu Bence Horváth

CPC Classification: B81B3/0043 (Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes ( takes precedence))

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