SUBSTRATE TRANSPORT APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND INSPECTION METHOD

Abstract: a taking hand including a first guide member provided on an upper surface of a base member and with which a peripheral edge of a substrate comes into contact, a first sensor configured to sense the substrate coming into contact with the first guide member, a second guide member provided on the upper surface of the base member and with which the peripheral edge of the substrate comes into contact, and a second sensor configured to sense the substrate coming into contact with the second guide member; and a comparison unit configured to determine an inclination state of the taking hand with respect to the substrate based on a difference between a timing at which the first sensor senses the substrate and a timing at which the second sensor senses the substrate are provided.

Inventor(s): Takuya SATO, Yuichi TAKAYAMA, Hiroyuki KAWAHARA

CPC Classification: B65G47/905 ({Control arrangements})

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