SUBSTRATE TRANSFER ROBOT AND SUBSTRATE PROCESSING APPARATUS INCLUDING SUBSTRATE TRANSFER ROBOT

Abstract: a substrate transfer robot includes a hand and a robot control unit. the hand includes: four guides (including a guide disposed on a distal end of the hand body) that are provided on the top surface of a hand body, and receive an outer edge portion of the substrate; a pusher disposed on a proximal end of the hand body; a pusher actuator that moves the pusher horizontally; and a weight sensor unit that measures the weight of the substrate placed on the hand. the guides and the pusher together grip the horizontally-orientated substrate on the four guides by clasping the substrate in the horizontal direction. the robot control unit changes the gripping force for gripping the substrate placed on the four guides, by controlling the pusher actuator depending on the weight measured by the weight sensor unit.

Inventor(s): Yuichi TAKAYAMA, Hiroyuki KAWAHARA, Takuya SATO

CPC Classification: B25J9/1612 ({characterised by the hand, wrist, grip control})

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