LASER LIFT-OFF APPARATUS AND METHOD OF LIFTING-OFF SUBSTRATE USING THE SAME

Abstract: in a laser lift-off apparatus configured to convert a first beam into a second beam having a width in a short axis direction and a long axis direction, the laser lift-off apparatus includes: a laser beam generator generating the first beam; a homogenizer homogenizing the first beam; and a wedge prism refracting at least a portion of the first beam passing through the homogenizer, wherein a beam profile of the second beam includes a first area and a second area having energy higher than that of the first area.

Inventor(s): Akifumi SANGU, Young Su CHAE, Cheol Ho PARK

CPC Classification: B23K26/067 (SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM (making metal-coated products by extruding metal ; building up linings or coverings by casting ; casting by dipping ; manufacture of composite layers by sintering metal powder ; arrangements on machine tools for copying or controlling ; covering metals or covering materials with metals, not otherwise provided for ; burners ))

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