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20250169206. Backside-illuminated Image (DB HiTek ., .)

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BACKSIDE-ILLUMINATED IMAGE SENSOR AND METHOD OF MANUFACTURING SAME

Abstract: proposed are a backside-illuminated image sensor and a method of manufacturing the same. more particularly, proposed are a backside-illuminated image sensor and a method of manufacturing the same, in which a plurality of align keys are formed in an epitaxial layer to be spaced apart from each other in the vertical direction, so that an align signal can be smoothly detected by an align key formed at a relatively shallow depth from a back surface of the epitaxial layer during a subsequent process.

Inventor(s): In Guen YEO

CPC Classification: H10F39/199 (No explanation available)

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