ACOUSTIC WAVE DEVICE

Abstract: an acoustic wave device includes a piezoelectric layer, an idt electrode including electrode fingers, and a dielectric film covering the idt electrode. when viewed in a direction orthogonal to a direction in which the electrode fingers extend, an area where adjacent two or more of the electrode fingers overlap one another is an intersecting area. the acoustic wave device further includes a thin-film layer at least a portion of which is embedded in the dielectric film, at least a portion of which overlaps the intersecting area in a plan view, an entirety of which does not overlap the electrode fingers in a plan view, having a higher density than the dielectric film, and having a smaller thickness than the electrode fingers. the electrode fingers and the thin-film layer are located at different positions in a thickness direction of the dielectric film.

Inventor(s): Naoki OSHIMA

CPC Classification: H03H9/02992 (IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (measuring, testing ; arrangements for producing a reverberation or echo sound ; impedance networks or resonators consisting of distributed impedances, e.g. of the waveguide type, ; control of amplification, e.g. bandwidth control of amplifiers, ; tuning resonant circuits, e.g. tuning coupled resonant circuits, ; networks for modifying the frequency characteristics of communication systems ))

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