ALIGNMENT PROCESS FOR THE TRANSFER SETUP

Abstract: a method of aligning a first substrate and a second substrate comprises positioning the first substrate having at least a first alignment mark in close proximity to the second substrate having at least a second alignment mark, measuring an alignment value between the first and second alignment marks of both the first and second substrate; and adjusting the position of the first substrate and the second substrate based on the measured alignment value.

Inventor(s): Gholamreza CHAJI

CPC Classification: H01L22/20 ({Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps})

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