ELECTRONIC DEVICE FOR PREDICTING CHARACTERISTIC OF SEMICONDUCTOR DEVICE AND OPERATING METHOD OF ELECTRONIC DEVICE

Abstract: a method of operating an electronic device includes selecting, by at least one processor, m first sample-label pairs (m being a positive integer); obtaining, by the at least one processor, m k-values; selecting, by the at least one processor, m second sample-label pairs respectively corresponding to the m first sample-label pairs based on the m k-values, generating, by the at least one processor, m third sample-label pairs based on the m first sample-label pairs and the m second sample-label pairs, and training, by the at least one processor, a regression analysis module based on the m third sample-label pairs, and the regression analysis module is trained to predict labels, which are associated with the semiconductor device, from the m third sample-label pairs.

Inventor(s): Seonghyeon Hwang, Euijong Whang, Hyunsoo Kwak, Sung Yoon Ryu, Sooseok Lee, Younghoon Sohn

CPC Classification: H01L22/12 ({for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions (electrical measurement of diffusions )})

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