PLASMA SHOWERHEAD ASSEMBLY AND METHOD OF REDUCING DEFECTS

Abstract: plasma showerhead assemblies are disclosed comprising a conductive plate having a plurality of the conductive plate gas openings, a dielectric faceplate having a thickness and a plurality of dielectric faceplate gas openings extending through the dielectric faceplate thickness in fluid communication with the plurality of the conductive plate gas openings. a plurality of tri-lobed o-rings surrounding the conductive plate gas openings and the dielectric faceplate gas openings are configured to form a seal between the dielectric faceplate gas openings and the conductive plate gas openings from atmospheric pressure.

Inventor(s): Rohit Ode, Sanjeev Baluja, Kenneth Brian Doering, Kevin Griffin, Hanhong Chen

CPC Classification: H01J37/3244 (Gas-filled discharge tubes (heating by discharge ))

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