Method and System for Imaging a Sample

Abstract: a sample is imaged by directing charged particle beam towards a sample and form an irradiation zone. the charged particle beam is scanned so that the irradiation zone is scanned in the sample plane in a first direction and the radiations from a detection zone are detected by a detector. a first number of detecting pixels arranged along a first detector axis corresponding to the first detection axis is fewer than a second number of detecting pixels arranged along a second detector axis corresponding to the second detection axis.

Inventor(s): Milos Malínský, Pavel Stejskal, Ondrej Ludmil Shanel

CPC Classification: H01J37/28 (with scanning beams {(, , take precedence)})

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