METHOD FOR GENERATING THREE-DIMENSIONAL DIAGRAM OF OBJECT, THREE-DIMENSIONAL DIAGRAM GENERATION APPARATUS AND THREE-DIMENSIONAL SHAPE INSPECTION APPARATUS

Abstract: a three-dimensional diagram generation apparatus () includes a controller () that generates a three-dimensional diagram of a semiconductor device based on an image obtained by imaging the semiconductor device. the controller () acquires a vertical view image and multiple oblique view images of the semiconductor device, extracts a contour line in the vertical view image to generate a vertical view diagram of the semiconductor device, converts the vertical view diagram into multiple oblique view diagrams based on a shape parameter stored in a storage part, repeatedly execute adjustment of the shape parameter and conversion of the vertical view diagram into each oblique view diagram until each converted oblique view diagram overlaps with each oblique view image, and synthesizes the generated vertical view diagram and each oblique view diagram overlapping with each oblique view image to generate the three-dimensional diagram.

Inventor(s): Hirokatsu MURAMATSU, Takuya ADACHI

CPC Classification: G06T17/00 (Three dimensional [3D] modelling, e.g. data description of 3D objects)

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