STORAGE AND TRANSFER MODULE AND SUBSTRATE TREATMENT APPARATUS INCLUDING STORAGE AND TRANSFER MODULE

Abstract: a storage and transfer module includes a module body, a storage and transfer unit disposed in the module body, the storage and transfer unit including a liftable transfer portion, and a storage portion disposed on the outside of the transfer portion, the storage portion having a storage space therein, and a transfer target portion in which a substrate is transferred by the transfer portion. a pair of the storage and transfer units are provided. the pair of storage and transfer units are disposed to oppose each other with the transfer target portion interposed therebetween. a substrate loading portion is disposed on one side of the storage and transfer units.

Inventor(s): Ki Won HAN, Doo Hyun BAEK, Hee Chan KIM, Tae Kyung KONG, Dong Kyum KIM

CPC Classification: G03F7/70808 (PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices ; photosensitive materials or processes for photographic purposes ; electrophotography, sensitive layers or processes therefor ))

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