APPARATUS AND METHOD FOR PROVIDING SENSOR DATA OF AN OPTICAL SYSTEM, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS HAVING AN OPTICAL SYSTEM

Abstract: an apparatus provides sensor data from at least one sensor of an optical system of a lithography apparatus. the apparatus comprises an analogue-to-digital converter and a digital filter device connected downstream of the analogue-to-digital converter. the analogue-to-digital converter is configured to convert an analogue signal sequence, which is provided via a number n of channels and includes a number n of analogue sensor signals from the number n of sensors of the optical system, into a digital signal sequence including n digital sensor signals. the analogue-to-digital converter and the digital filter device have the same frequency-synchronized system clock. the digital filter device is configured to filter the n digital sensor signals of the digital signal sequence in a channel-specific manner for providing and storing a respective filtered digital sensor signal for each of the n channels.

Inventor(s): Steffen VAAS, Stefan KRONE, Thomas RETTENMAIER, Lars BERGER

CPC Classification: G03F7/70508 (PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices ; photosensitive materials or processes for photographic purposes ; electrophotography, sensitive layers or processes therefor ))

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