DRIVE ELEMENT AND LIGHT DEFLECTION ELEMENT

Abstract: a drive element includes: a movable part; a first support part extending along a rotation axis of the movable part and connected at one end thereof to the movable part; a pair of arm parts placed with the rotation axis located therebetween; a pair of coupling parts coupling the pair of arm parts to another end of the first support part; a second support part extending along the rotation axis and supporting the pair of coupling parts; a fixation part to which the second support part is connected; and drive parts configured to drive the arm parts, respectively. the second support part has higher rigidity than the first support part, and the pair of coupling parts are placed so as to be inclined toward the movable part side. an angle between each coupling part and the second support part is greater than 90� and equal to or less than 135�.

Inventor(s): Kensuke MIHARA, Takami ISHIDA

CPC Classification: G02B26/0833 ({the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD ( takes precedence; micromechanical devices in general )})

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