METHODS AND APPARATUSES FOR TESTING ELECTRICAL CONNECTIONS OF A SUBSTRATE

Abstract: a method for testing electrical connections of a substrate is described, the substrate having a first surface contact and a first electrical connection extending from the first surface contact. the method includes: (a) discharging the first surface contact by focusing and deflecting a first electron beam having a first electron energy on the first surface contact; (b) charging the first surface contact by focusing and deflecting a second electron beam having a second electron energy different from the first electron energy on the first surface contact; and (c) inspecting the first electrical connection by detecting signal electrons emitted from the substrate. further described are apparatuses for testing electrical connections of a substrate using two electron beams of different electron energies in accordance with the methods described herein.

Inventor(s): Axel WENZEL, Ludwig LEDL, Bernhard G. MUELLER

CPC Classification: G01R31/66 (Testing of connections, e.g. of plugs or non-disconnectable joints (testing for incorrect line connections ))

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