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20250164370. Film (INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE)

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FILM EVALUATION SYSTEM AND EVALUATION METHOD THEREOF

Abstract: film evaluation system and evaluation method thereof are provided. the film evaluation system includes a measurement unit, an observation unit, an adaptive algorithm unit, an estimation unit, and a health state calculation unit. the measurement unit obtains an initial state parameter set corresponding to a film. the observation unit is connected to the measurement unit and obtains a flux observation value according to the initial state parameter set. the adaptive algorithm unit is connected to the observation unit and obtains a flux prediction value according to the initial state parameter set. the estimation unit is connected to the adaptive algorithm unit and obtains a diffusion rate and a flow resistance by comparing the flux observation value and the flux prediction value. the health state calculation unit is connected to the estimation unit and obtains a health state of the film according to the diffusion rate and the flow resistance.

Inventor(s): Meng-Shun HUANG, Ting-Ting CHANG, Wu-Yang SEAN, Yi-Hsien CHIANG, Jen-Chieh WU

CPC Classification: G01N11/04 (INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing processes other than immunoassay, involving enzymes or microorganisms , ))

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