METHOD FOR SETTING FORWARD/BACKWARD MOVEMENT RECIPE FOR SHIELDING BODY, AND PLATING APPARATUS

Abstract: there is provided method and a plating apparatus capable of improving uniformity of a plating film formed on a substrate. there is proposed a method for, in a computer, setting a forward/backward movement recipe for a shielding body in a plating apparatus, the plating apparatus including the shielding body, the shielding body being movable to a shielding position interposed between a plating target surface of a substrate and an anode and to a retracted position retracted from between the plating target surface of the substrate and the anode; and the method includes steps of: acquiring a resist pattern of the substrate, calculating a plating growth coefficient for each certain-angle area of the substrate based on the acquired resist pattern, and setting the forward/backward movement recipe for the shielding body based on the calculated plating growth coefficient for each certain-angle area.

Inventor(s): Masayuki FUJIKI, Fumihiro NIIJIMA, Yosuke NAGASAWA, Kazuma IDEGUCHI

CPC Classification: C25D17/008 ({Current shielding devices})

Search for rejections for patent application number 20250163601