HEAD FOR EJECTING REACTIVE GAS FOR FILM FORMATION AND METHOD FOR MANUFACTURING THE SAME

Abstract: disclosed is a method for manufacturing a head including: diffusion-bonding a first plate and a second plate to each other; and forming, after the diffusion bonding, a nickel-containing film on surfaces of the first plate and the second plate with electroless plating. the first plate and the second plate are configured to have a channel through which the reactive gas passes from a side of the first plate to a side of the second plate in a state where the first plate and the second plate are bonded.

Inventor(s): Yoshihito ARAKI, Noriyoshi KANEDA

CPC Classification: C23C16/45565 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion ; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. , ; metallising of glass ; metallising mortars, concrete, artificial stone, ceramics or natural stone ; enamelling of, or applying a vitreous layer to, metals ; treating metal surfaces or coating of metals by electrolysis or electrophoresis ; single-crystal film growth ; by metallising textiles ; decorating textiles by locally metallising ))

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