20250153481. Method And Substrate (EV Group E. Thallner GmbH)
METHOD AND SUBSTRATE SYSTEM FOR THE SEPARATION OF CARRIER SUBSTRATES
Abstract: the invention relates to a method and a substrate system for the separation of a carrier substrate from a substrate, in particular a product substrate, by irradiation of the separating layer.
Inventor(s): Markus Wimplinger, Thomas Uhrmann, Jurgen Burggraf, Boris Povazay, Bernhard Thallner
CPC Classification: B32B43/006 ({Delaminating})
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