SUBSTRATE-CONVEYING ROBOT

Abstract: a substrate-conveying robot () includes a wrist joint (jt) including a first bearing(s) () rotatably supporting a first rotation shaft () for rotating a first substrate-holding hand (), and a second bearing(s) () rotatably supporting a second rotation shaft () for rotating the second substrate-holding hand (). the first and second bearings are ball bearings.

Inventor(s): Takeshi SHIBATA, Ryota ONO, Junichi MATSUOKA

CPC Classification: B25J9/108 ({Bearings specially adapted therefor (bearings in general )})

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