ULTRASONIC OSCILLATOR ELEMENT AND ULTRASONIC TRANSDUCER DEVICE

Abstract: an ultrasonic oscillator element, including a substrate, a first lower electrode, a first insulating layer, a second insulating layer, a second lower electrode, a first upper electrode, and a third insulating layer. the first lower electrode is disposed on the substrate. the first insulating layer is disposed so that the first lower electrode is located between the first insulating layer and the substrate. the second insulating layer and the first insulating layer form a first cavity. the second lower electrode is disposed adjacent to the first side of the second insulating layer and located in the outer region of the first cavity. the first upper electrode is disposed on the second side of the second insulating layer. the third insulating layer is disposed so that the second lower electrode is located between the third insulating layer and the first insulating layer.

Inventor(s): Fu-Sheng Jiang, Yang-Zong Fan

CPC Classification: B06B1/0662 (METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, {e.g.} FOR PERFORMING MECHANICAL WORK IN GENERAL (for particular applications, see the relevant subclasses, e.g. , , ; measurement of mechanical vibrations ; in direction finding, locating, distance or velocity measuring ; {generating seismic energy }; control of mechanical vibrations in general ; sound-producing devices, e.g. bells, sirens, whistles , {e.g. methods or devices for transmitting, conducting, or directing sound in general }; generation of electrical oscillations ; electromechanical resonators in general ; electromechanical transducers {for communication techniques, e.g. microphones, speakers} ))

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