19019311. DIE CLEANING SYSTEMS AND RELATED METHODS (SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC)
DIE CLEANING SYSTEMS AND RELATED METHODS
Organization Name
SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor(s)
Michael J. Seddon of Gilbert AZ US
DIE CLEANING SYSTEMS AND RELATED METHODS
This abstract first appeared for US patent application 19019311 titled 'DIE CLEANING SYSTEMS AND RELATED METHODS
Original Abstract Submitted
Implementations of methods of forming a plurality of semiconductor die may include forming a damage layer beneath a surface of a die street in a semiconductor substrate, singulating the semiconductor substrate along the die street into a plurality of semiconductor die, and removing one or more particulates in the die street after singulating through applying sonic energy to the plurality of semiconductor die.