19017085. METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE (Kioxia Corporation)
METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE
Organization Name
Inventor(s)
Minako Inukai of Yokohama Kanagawa JP
Hideaki Sakurai of Kawasaki Kanagawa JP
Kyo Otsubo of Shinagawa Tokyo JP
Tetsuo Takemoto of Yokohama Kanagawa JP
METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE
This abstract first appeared for US patent application 19017085 titled 'METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE
Original Abstract Submitted
According to one embodiment, a method including supplying a liquid onto a substrate, solidifying the liquid on the substrate to form a solidified body, and melting the solidified body of the liquid on the substrate is provided. When solidifying the liquid, an internal pressure of the liquid on the substrate is varied.