19013102. SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME (Micron Technology, Inc.)
SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
Organization Name
Inventor(s)
Haruka Momota of Sagamihara JP
Keizo Kawakita of Higashihiroshima JP
SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
This abstract first appeared for US patent application 19013102 titled 'SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
Original Abstract Submitted
An apparatus includes an active region; a scribe region surrounding the active region; a test component in the scribe region; a pad electrode in the active region; and a power supply wiring of an upper wiring layer in the active region, the power supply wiring extending between the test component and the pad electrode; and an interconnection structure coupling the test component and the pad electrode across a border between the active region and the scribe region, the interconnection structure including a wiring portion of a lower wiring layer crossing the power supply wiring.