19012150. ION MILLING DEVICE (HITACHI HIGH-TECH CORPORATION)
ION MILLING DEVICE
Organization Name
Inventor(s)
ION MILLING DEVICE
This abstract first appeared for US patent application 19012150 titled 'ION MILLING DEVICE
Original Abstract Submitted
Provided is an ion milling apparatus capable of enhancing reproducibility of an ion distribution. The ion milling apparatus includes: an ion source ; a sample stage on which a sample to be processed by being irradiated with an unfocused ion beam from the ion source is placed; and a measurement member holding unit that holds an ion beam current measurement member . A covering material is provided so as to cover at least a surface of the measurement member holding unit and the sample stage facing the ion source . A material of the covering material contains, as a main component, an element having an atomic number smaller than that of an element of a material of a structure on which the covering material is provided. The ion beam current measurement member is moved in an irradiation range of the ion beam on a trajectory, which is located between the ion source and the sample stage, in a state where the ion beam is output from the ion source under a first irradiation condition, and an ion beam current flowing when the ion beam current measurement member is irradiated with the ion beam is measured.