19007249. TRANSPORT SYSTEM AND CONTROL METHOD OF TRANSPORT SYSTEM (CANON KABUSHIKI KAISHA)
TRANSPORT SYSTEM AND CONTROL METHOD OF TRANSPORT SYSTEM
Organization Name
Inventor(s)
Satoshi Nukushina of Kanagawa JP
TRANSPORT SYSTEM AND CONTROL METHOD OF TRANSPORT SYSTEM
This abstract first appeared for US patent application 19007249 titled 'TRANSPORT SYSTEM AND CONTROL METHOD OF TRANSPORT SYSTEM
Original Abstract Submitted
A transport system includes: a mover on which a workpiece is mounted and which is movable in a first direction; a stator that has a plurality of coils arranged in the first direction and applies force to the mover by using the plurality of coils, the force transporting the mover in the first direction while floating the mover in a second direction crossing the first direction; a control unit that acquires a position and an attitude of the mover moving in the first direction while floating in the second direction and controls the current applied to the plurality of coils to control operation of the mover based on the acquired position and attitude; and a positioning part that limits the movement of the mover, wherein the positioning part includes a first positioning part that limits the movement of the mover in a direction of external force applied to the workpiece.