19005943. SUBSTRATE SUPPORT DESIGNS FOR A DEPOSITION CHAMBER (Applied Materials, Inc.)
SUBSTRATE SUPPORT DESIGNS FOR A DEPOSITION CHAMBER
Organization Name
Inventor(s)
Govinda Raj of Santa Clara CA US
Anubhav Srivastava of Bangalore IN
Santhosh Kumar Pillappa of Bangalore IN
SUBSTRATE SUPPORT DESIGNS FOR A DEPOSITION CHAMBER
This abstract first appeared for US patent application 19005943 titled 'SUBSTRATE SUPPORT DESIGNS FOR A DEPOSITION CHAMBER
Original Abstract Submitted
The present disclosure generally relates to a substrate support that includes a body having a substrate receiving surface, the body comprising a dielectric material. The body also includes a first foil embedded in the body below the substrate receiving surface. The body also includes an electrically conductive mesh embedded in the body below the first foil. The body also includes a center tap structure formed in a bottom surface of the body that is in electrical communication with the mesh.