19005034. SEMICONDUCTOR DEVICE (Samsung Electronics Co., Ltd.)
SEMICONDUCTOR DEVICE
Organization Name
Inventor(s)
Won Cheol Jeong of Seongnam-si KR
Jin Wook Kim of Hwaseong-si KR
Yoon Young Jung of Suwon-si KR
SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 19005034 titled 'SEMICONDUCTOR DEVICE
Original Abstract Submitted
A semiconductor device includes an active pattern extending in a first direction on a substrate, a gate structure on the active pattern and having a gate electrode extending in a second direction intersecting the active pattern, and a gate capping pattern on the gate electrode, the gate capping pattern including a gate capping liner defining a gate capping recess, the gate capping liner having a horizontal portion along an upper surface of the gate electrode, and a vertical portion extending from the horizontal portion in a third direction intersecting the first and second directions, and a gate capping filling film on the gate capping liner and filling the gate capping recess, an epitaxial pattern on the active pattern and adjacent the gate structure, a gate contact on and connected to the gate electrode, and an active contact on and connected to the epitaxial pattern.