19000327. SENSOR DATA COMPRESSION IN A PLASMA TOOL (LAM RESEARCH CORPORATION)
SENSOR DATA COMPRESSION IN A PLASMA TOOL
Organization Name
Inventor(s)
John Valcore, Jr. of Worthington OH US
Travis Joseph Wong of Oakland CA US
Sandeep Mudunuri of Austin TX US
Bostjan Pust of San Ramon CA US
SENSOR DATA COMPRESSION IN A PLASMA TOOL
This abstract first appeared for US patent application 19000327 titled 'SENSOR DATA COMPRESSION IN A PLASMA TOOL
Original Abstract Submitted
Systems and methods for compressing data are described. One of the methods includes receiving a plurality of measurement signals from one or more sensors coupled to a radio frequency (RF) transmission path of a plasma tool. The RF transmission path is from an output of an RF generator to an electrode of a plasma chamber. The method includes converting the plurality of measurement signals from an analog form to a digital form to sample data and processing the data to reduce an amount of the data. The amount of the data is compressed to output compressed data. The method includes sending the compressed data to a controller for controlling the plasma tool.