19000022. ELECTROCHEMICAL DEPOSITION SYSTEM INCLUDING OPTICAL PROBES (LAM RESEARCH CORPORATION)
ELECTROCHEMICAL DEPOSITION SYSTEM INCLUDING OPTICAL PROBES
Organization Name
Inventor(s)
Andrew James Pfau of Portland OR US
Shantinath Ghongadi, Jr. of Tigard OR US
Manish Ranjan of Sherwood OR US
ELECTROCHEMICAL DEPOSITION SYSTEM INCLUDING OPTICAL PROBES
This abstract first appeared for US patent application 19000022 titled 'ELECTROCHEMICAL DEPOSITION SYSTEM INCLUDING OPTICAL PROBES
Original Abstract Submitted
An electrochemical deposition system includes: an electrochemical deposition chamber including an electrolyte for electrochemical deposition; a substrate holder configured to hold a substrate and including a first cathode that is electrically connected to the substrate; a first actuator configured to adjust a vertical position of the substrate holder within the electrochemical deposition chamber; an anode submerged in the electrolyte; a second cathode arranged between the first cathode and the anode; a first optical probe configured to measure a first reflectivity of the substrate at a first distance from a center of the substrate while the substrate is submerged within the electrolyte during the electrochemical deposition; and a controller configured to, based on the first reflectivity, selectively adjust at least one of power applied to the first cathode, power applied to the second cathode, power applied to the anode, and the vertical position of the substrate holder.