18999945. ADVANCED LITHOGRAPHY AND SELF-ASSEMBLED DEVICES (Intel Corporation)
ADVANCED LITHOGRAPHY AND SELF-ASSEMBLED DEVICES
Organization Name
Inventor(s)
Richard E. Schenker of Portland OR US
Robert L. Bristol of Portland OR US
Kevin L. Lin of Beaverton OR US
Florian Gstrein of Portland OR US
James M. Blackwell of Portland OR US
Marie Krysak of Portland OR US
Manish Chandhok of Beaverton OR US
Paul A. Nyhus of Portland OR US
Charles H. Wallace of Portland OR US
Curtis W. Ward of Hillsboro OR US
Swaminathan Sivakumar of Beaverton OR US
Elliot N. Tan of Portland OR US
ADVANCED LITHOGRAPHY AND SELF-ASSEMBLED DEVICES
This abstract first appeared for US patent application 18999945 titled 'ADVANCED LITHOGRAPHY AND SELF-ASSEMBLED DEVICES
Original Abstract Submitted
Advanced lithography techniques including sub-10 nm pitch patterning and structures resulting therefrom are described. Self-assembled devices and their methods of fabrication are described.
Categories:
- Intel Corporation
- Richard E. Schenker of Portland OR US
- Robert L. Bristol of Portland OR US
- Kevin L. Lin of Beaverton OR US
- Florian Gstrein of Portland OR US
- James M. Blackwell of Portland OR US
- Marie Krysak of Portland OR US
- Manish Chandhok of Beaverton OR US
- Paul A. Nyhus of Portland OR US
- Charles H. Wallace of Portland OR US
- Curtis W. Ward of Hillsboro OR US
- Swaminathan Sivakumar of Beaverton OR US
- Elliot N. Tan of Portland OR US
- H01L23/528
- H01L23/522
- H01L23/532
- H10D30/69
- H10D84/83
- CPC H01L23/528