18985663. METAL DEPOSITION (Lam Research Corporation)
METAL DEPOSITION
Organization Name
Inventor(s)
Ravi Vellanki of San Jose CA US
Eric H. Lenz of Livermore CA US
Vinayakaraddy Gulabal of Yadgir IN
Sanjay Gopinath of Fremont CA US
Michal Danek of Cupertino CA US
Prodyut Majumder of Bengaluru IN
Novy Tjokro of Union City CA US
Yen-Chang Chen of San Jose CA US
Shruti Vivek Thombare of Sunnyvale CA US
Patrick Van Cleemput of Castle Rock WA US
METAL DEPOSITION
This abstract first appeared for US patent application 18985663 titled 'METAL DEPOSITION
Original Abstract Submitted
Various showerheads and methods are provided. A showerhead may include a faceplate partially defined by a front surface and a back surface, a back plate having a gas inlet, a first conical frustum surface, and a second conical frustum surface, a plenum volume fluidically connected to the gas inlet and at least partially defined by the gas inlet, the back surface of the faceplate, the first conical frustum surface, and the second conical frustum surface, and a baffle plate positioned within the plenum volume, and having a plurality of baffle plate through-holes extending through the baffle plate. The second conical frustum surface may be positioned radially outwards from the first conical frustum surface with respect to a center axis of the showerhead, and the second conical frustum surface may be positioned along the center axis farther from the gas inlet than the first conical frustum surface.
- Lam Research Corporation
- Ravi Vellanki of San Jose CA US
- Eric H. Lenz of Livermore CA US
- Vinayakaraddy Gulabal of Yadgir IN
- Sanjay Gopinath of Fremont CA US
- Michal Danek of Cupertino CA US
- Prodyut Majumder of Bengaluru IN
- Novy Tjokro of Union City CA US
- Yen-Chang Chen of San Jose CA US
- Shruti Vivek Thombare of Sunnyvale CA US
- Gorun Butail of Fremont CA US
- Patrick Van Cleemput of Castle Rock WA US
- C23C16/455
- C23C16/06
- H01L21/3205
- CPC C23C16/45565